DocumentCode
440252
Title
High rate CVD-diamond etching for high temperature pressure sensor applications
Author
Otterbach, R. ; Hilleringmann, U.
Author_Institution
University of Dortmund, Germany
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
320
Lastpage
323
Keywords
Anisotropic magnetoresistance; Biomembranes; Chemical sensors; Etching; Image sensors; Joining processes; Mechanical sensors; Piezoresistance; Silicon; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505504
Link To Document