DocumentCode
440253
Title
Novel Surface-Micromachined Thermal Actuator for Fracture and Reliability Characterisation of Polysilicon by Electrical Wafer-Level Testing
Author
Kapels, H. ; Urscher, J. ; Aigner, R. ; Sattler, R. ; Wachutka, G. ; Binder, J.
Author_Institution
Infineon Technologies, Munich, Germany
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
324
Lastpage
327
Keywords
Electric variables measurement; Electrical resistance measurement; Electrostatic actuators; Electrothermal effects; Micromechanical devices; Microstructure; Stability; Surface cracks; Testing; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505505
Link To Document