DocumentCode
440260
Title
The effect of elevated temperature on the reliability of very thin oxide films
Author
Kaczer, B. ; Degraeve, R. ; Pangon, N. ; Nigam, T. ; Groeseneken, G.
Author_Institution
IMEC, Leuven, Belgium
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
356
Lastpage
359
Keywords
Acceleration; Electric breakdown; Integrated circuit reliability; Integrated circuit technology; Logic circuits; Logic devices; Silicon carbide; Stress measurement; Temperature distribution; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505513
Link To Document