DocumentCode :
44251
Title :
Best Paper Award and Changes to the Editorial Board
Author :
Cunningham, Sean P.
Author_Institution :
Intel Corporation, Santa Clara, CA, USA
Volume :
26
Issue :
2
fYear :
2013
fDate :
May-13
Firstpage :
177
Lastpage :
177
Abstract :
The editors chose "Lens Heating Induced Aberration Prediction via Nonlinear Kalman Filters," by Can Bikcora, Martiijn van Veelen, Siep Weiland, and Wim M. J. Coene, as the Best Paper for the Transactions published in 2012.
Keywords :
Awards;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2013.2259319
Filename :
6512092
Link To Document :
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