DocumentCode
443031
Title
Equivalent Circuit for a SAW IDT in Multi-Layer Media with an Electrically Conductive Silicon Substrate
Author
Venema, A. ; Humphryes, R.F.
fYear
1977
fDate
1977
Firstpage
637
Lastpage
641
Keywords
Acoustic signal detection; Acoustic transducers; Admittance; Capacitance; Conductivity; Equivalent circuits; Piezoelectric transducers; Silicon; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1977
Type
conf
DOI
10.1109/ULTSYM.1977.196912
Filename
1533852
Link To Document