Title :
Equivalent Circuit for a SAW IDT in Multi-Layer Media with an Electrically Conductive Silicon Substrate
Author :
Venema, A. ; Humphryes, R.F.
Keywords :
Acoustic signal detection; Acoustic transducers; Admittance; Capacitance; Conductivity; Equivalent circuits; Piezoelectric transducers; Silicon; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1977
DOI :
10.1109/ULTSYM.1977.196912
