DocumentCode
443070
Title
Deeply Etched S.A.W. Resonators
Author
Adams, Charles A. ; Kusters, John A.
fYear
1977
fDate
1977
Firstpage
246
Lastpage
250
Keywords
Acoustic devices; Aluminum; Etching; Gratings; Plasma temperature; Resists; Resonance; Stability; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
31st Annual Symposium on Frequency Control. 1977
Type
conf
DOI
10.1109/FREQ.1977.200155
Filename
1537095
Link To Document