DocumentCode
443282
Title
Nonlinear vibrations of a MEMS translational device
Author
Leo, Elisabetta ; Braghin, Francesco ; Resta, Ferruccio
Author_Institution
Mech. Dept., Polytech. of Milan, Italy
Volume
1
fYear
2005
fDate
25-28 July 2005
Firstpage
229
Abstract
When significantly displacing a proof mass, the nonlinear hardening characteristic of the supporting beams becomes visible. Thus, the resonance peak of the structure is no longer vertical but bends towards the higher frequencies. This property is useful to easily synchronise sense and drive resonances thus increasing the sensibility of the MEMS device. Through a test structure designed to investigate the high deformation range of the supporting beams, its nonlinear vibrations were investigated both experimentally and numerically.
Keywords
beams (structures); deformation; micromechanical devices; vibrations; MEMS translational device; deformation; drive resonance; mass displacement; nonlinear vibrations; resonance synchronization; sense resonance; supporting beams; Damping; Drives; Frequency; Gyroscopes; Microelectromechanical devices; Micromechanical devices; Production; Resonance; Testing; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN
0-7803-9345-7
Type
conf
DOI
10.1109/RME.2005.1543045
Filename
1543045
Link To Document