Title :
Design and simulation of RF MEMS switches for high switching speed and moderate voltage operation
Author :
Saha, Shimul Chandra ; Singh, Tajeshwar ; Saether, Trond
Author_Institution :
Dept. of Electron. & Telecommun., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
Abstract :
In this paper we present the design and simulations of an RF MEMS switch with regard to its switching speed and pull-down voltage. The switch is required to fulfill the requirements of high speed and a moderate pull down voltage for the switching of CMUT (capacitive micromachined ultrasonic transducer) elements used for ultrasound imaging.
Keywords :
capacitive sensors; high-speed techniques; microswitches; ultrasonic transducers; RF MEMS switches; capacitive micromachined ultrasonic transducer elements; high switching speed; moderate voltage operation; pull down voltage; Biomembranes; Electrodes; Probes; Radiofrequency microelectromechanical systems; Signal processing; Switches; Telecommunication switching; Ultrasonic imaging; Ultrasonic transducers; Voltage;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543046
