Title :
Monolithic CMOS 3-axis accelerometer combining piezoresistive and heat transfer effects
Author :
Chaehoi, A. ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal
Keywords :
Acceleration; Accelerometers; Analytical models; CMOS image sensors; Electrical resistance measurement; Heat transfer; Piezoresistance; Robot sensing systems; Structural beams; Temperature sensors;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543050
