• DocumentCode
    443286
  • Title

    Monolithic CMOS 3-axis accelerometer combining piezoresistive and heat transfer effects

  • Author

    Chaehoi, A. ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal

  • Volume
    1
  • fYear
    2005
  • fDate
    25-28 July 2005
  • Firstpage
    612
  • Lastpage
    615
  • Keywords
    Acceleration; Accelerometers; Analytical models; CMOS image sensors; Electrical resistance measurement; Heat transfer; Piezoresistance; Robot sensing systems; Structural beams; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Research in Microelectronics and Electronics, 2005 PhD
  • Print_ISBN
    0-7803-9345-7
  • Type

    conf

  • DOI
    10.1109/RME.2005.1543050
  • Filename
    1543050