DocumentCode
443286
Title
Monolithic CMOS 3-axis accelerometer combining piezoresistive and heat transfer effects
Author
Chaehoi, A. ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal
Volume
1
fYear
2005
fDate
25-28 July 2005
Firstpage
612
Lastpage
615
Keywords
Acceleration; Accelerometers; Analytical models; CMOS image sensors; Electrical resistance measurement; Heat transfer; Piezoresistance; Robot sensing systems; Structural beams; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN
0-7803-9345-7
Type
conf
DOI
10.1109/RME.2005.1543050
Filename
1543050
Link To Document