Title :
3-D thermal modeling of finFET
Author :
Joshi, R.V. ; Pascual-Gutiérrez, José A. ; Chuang, C.T.
Keywords :
CMOS technology; Conductivity measurement; Electrical resistance measurement; FinFETs; Immune system; MOSFETs; Semiconductor films; Temperature sensors; Thermal conductivity; Thermal resistance;
Conference_Titel :
Solid-State Device Research Conference, 2005. ESSDERC 2005. Proceedings of 35th European
Print_ISBN :
0-7803-9203-5
DOI :
10.1109/ESSDER.2005.1546589
