DocumentCode
443920
Title
3-D thermal modeling of finFET
Author
Joshi, R.V. ; Pascual-Gutiérrez, José A. ; Chuang, C.T.
fYear
2005
fDate
12-16 Sept. 2005
Firstpage
77
Lastpage
80
Keywords
CMOS technology; Conductivity measurement; Electrical resistance measurement; FinFETs; Immune system; MOSFETs; Semiconductor films; Temperature sensors; Thermal conductivity; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2005. ESSDERC 2005. Proceedings of 35th European
Print_ISBN
0-7803-9203-5
Type
conf
DOI
10.1109/ESSDER.2005.1546589
Filename
1546589
Link To Document