Title :
Improved performance of top-emitting, oxide-confined VCSELs with self-aligned contact and Cu-plated heatsink
Author :
Al-Omari, Ahmad N. ; Lear, Kevin L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA
Abstract :
Vertical-cavity surface-emitting lasers (VCSELs) with a self-aligned top contact and copper-plated heatsink were fabricated and characterized. Thermal resistance was reduced by 44%, and output power and bandwidth were increased by 38% and 12% respectively.
Keywords :
copper; heat sinks; laser beams; laser cavity resonators; optical fabrication; surface emitting lasers; thermo-optical effects; Cu-plated heatsink; laser characterization; laser fabrication; oxide-confined VCSEL; self-aligned contact; thermal resistance; top-emitting VCSEL performance; vertical-cavity surface-emitting lasers; Apertures; Bandwidth; Contacts; Etching; Gold; Semiconductor lasers; Surface emitting lasers; Surface resistance; Thermal conductivity; Vertical cavity surface emitting lasers;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2005. QELS '05
Print_ISBN :
1-55752-796-2
DOI :
10.1109/QELS.2005.1549016
