Title :
Laser radiometry for F2 lasers at 157 nm
Author :
Kück, Stefan ; Brandt, Friedhelm ; Kremling, Hans-Albert
Author_Institution :
Opt. Div., Phys. Tech. Bundesanstalt, Braunschweig, Germany
Abstract :
First results of the calibration of a commercially available thermal detector for 157 nm F2 laser radiation at power levels around 700 mW are presented. The responsivity, homogeneity and uncertainties were investigated and determined.
Keywords :
calibration; excimer lasers; fluorine; heat radiation; measurement by laser beam; measurement uncertainty; optical instruments; optical testing; radiometry; 157 nm; 700 mW; F2; F2 laser radiation; calibration; laser radiometry; metrology; optical instrument; optical standard; optical testing; thermal detector; uncertainty; Apertures; Atmosphere; Calibration; Laser beams; Laser theory; Measurement standards; Monitoring; Optical devices; Power lasers; Radiometry;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2005. QELS '05
Print_ISBN :
1-55752-796-2
DOI :
10.1109/QELS.2005.1549071