• DocumentCode
    444401
  • Title

    Laser radiometry for F2 lasers at 157 nm

  • Author

    Kück, Stefan ; Brandt, Friedhelm ; Kremling, Hans-Albert

  • Author_Institution
    Opt. Div., Phys. Tech. Bundesanstalt, Braunschweig, Germany
  • Volume
    2
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    1179
  • Abstract
    First results of the calibration of a commercially available thermal detector for 157 nm F2 laser radiation at power levels around 700 mW are presented. The responsivity, homogeneity and uncertainties were investigated and determined.
  • Keywords
    calibration; excimer lasers; fluorine; heat radiation; measurement by laser beam; measurement uncertainty; optical instruments; optical testing; radiometry; 157 nm; 700 mW; F2; F2 laser radiation; calibration; laser radiometry; metrology; optical instrument; optical standard; optical testing; thermal detector; uncertainty; Apertures; Atmosphere; Calibration; Laser beams; Laser theory; Measurement standards; Monitoring; Optical devices; Power lasers; Radiometry;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2005. QELS '05
  • Print_ISBN
    1-55752-796-2
  • Type

    conf

  • DOI
    10.1109/QELS.2005.1549071
  • Filename
    1549071
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=444401