Title :
24 GHz differential integrated antennas in 10 Ω-cm bulk silicon
Author :
Shamim, Atif ; Roy, Langis ; Tarr, Garry ; Levenets, Vlad ; Fong, Neric
Author_Institution :
Dept. of Electron., Carleton Univ., Ottawa, Ont., Canada
Abstract :
We have demonstrated high performance, low cost, 24 GHz differential antennas on lossy 10 Ω Si using compatible copper metallization post-processing. A gain of -8 dBi and favorable differential impedances (<50 Ω) are obtained. These antennas have strong potential for integration into VLSI technology to implement single-chip wireless systems for short range communication applications.
Keywords :
VLSI; copper; dipole antennas; silicon; 10 ohm; 24 GHz; VLSI technology; copper metallization post-processing; differential antennas; differential impedances; lossy silicon; short range communication; single-chip wireless systems; Antenna measurements; Bonding; Circuits; Conductivity; Costs; Dipole antennas; Frequency; Horn antennas; Impedance matching; Silicon;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2005 IEEE
Print_ISBN :
0-7803-8883-6
DOI :
10.1109/APS.2005.1551373
