Title :
Cobalt silicide nanocrystal memory
Author :
Zhao, Dengtao ; Zhu, Yan ; Li, Ruigang ; Liu, Jianlin
Keywords :
Capacitance; Capacitance-voltage characteristics; Cobalt; Etching; Furnaces; Nanocrystals; Nonvolatile memory; Random access memory; Silicides; Tunneling;
Conference_Titel :
Device Research Conference Digest, 2005. DRC '05. 63rd
Print_ISBN :
0-7803-9040-7
DOI :
10.1109/DRC.2005.1553077
