DocumentCode
445751
Title
Electromagnetic emission within the beat field of the silicon samples with differently polished surfaces
Author
Arefyev, K. ; Salnikov, Vladimir ; Lukyanova, Evguenya
Author_Institution
Tomsk Polytech. Inst., Russia
Volume
2
fYear
2004
fDate
26 June-3 July 2004
Firstpage
188
Abstract
Results on measurement of impulse electromagnetic emission of the silicon samples with different surface treatment are presented in this paper.
Keywords
elemental semiconductors; polishing; silicon; surface electromagnetic waves; Si; beat field; impulse electromagnetic emission; polished surface; surface treatment; Electromagnetic fields; Electromagnetic heating; Electromagnetic measurements; Grain size; Paramagnetic materials; Powders; Silicon; Solids; Surface treatment; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN
0-7803-8383-4
Type
conf
DOI
10.1109/KORUS.2004.1555587
Filename
1555587
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