Title :
SAW resonators on ceramics with controlled piezoelectric properties
Author :
Sajin, George ; MOISIN, Ana Maria ; Craciunoiu, Florea ; DUMITRU, Alina-Lulia
Author_Institution :
National Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
The paper presents the works carried out in order to obtain SAW devices on ceramic substrates with controlled piezoelectric properties. As ceramics, two different perovskite type systems were chosen: lead titanate with rare earths substitutions and substituted lead titanate zirconate. The resonant frequency resulting from measurements on 12 resonators is distributed in a narrow range centred on 9 MHz. A very important limiting parameter is the roughness of the substrate and a comparison between two ceramics with different surface polishing degrees is made.
Keywords :
ceramics; lead compounds; piezoelectricity; polishing; surface acoustic wave resonators; surface roughness; (Pb1-1.5xLax)(Ti1-yMny)O3; (Pb1-1.5xSmx)(Ti1-yMny)O3; Pb(Zr0.52Ti0.48)1-yNbyO3; SAW resonators; ceramics; controlled piezoelectric properties; perovskite type systems; rare earths substitutions; resonant frequency; surface polishing; Ceramics; Crystalline materials; Dielectric materials; Dielectric substrates; Milling machines; Piezoelectric materials; Powders; Rough surfaces; Surface acoustic waves; Surface roughness;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558719