DocumentCode :
446565
Title :
Surface studies and electrical tests of porous-silicon SnO2 gas-sensors
Author :
Dima, O. ; Becks, K.-H. ; Dima, A. ; Moldovan, C.
Author_Institution :
Dept. of Phys., Wuppertal Univ., Germany
Volume :
1
fYear :
2005
fDate :
3-5 Oct. 2005
Firstpage :
253
Abstract :
Electrical tests of porous/silicon SnO2 gas sensors show the advantage of the porous substrate on sensor sensitivity and working temperature. Surface studies, especially related to the metallisation process, reveal technological problems and possible directions of action that foster the integration of this highly promising platform with other technologies (particularly metallisation/interconnectivity technologies, such as Multi-Chip Module ∼ Deposited, MCM-D).
Keywords :
elemental semiconductors; gas sensors; metallisation; porous materials; silicon; tin compounds; MCM-D; Si; SnO2; electrical test; gas sensor; metallisation; porous substrate; sensor sensitivity; Boron; Etching; Ethanol; Gas detectors; Gold; Metallization; Pharmaceutical technology; Silicon; Temperature sensors; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
Type :
conf
DOI :
10.1109/SMICND.2005.1558761
Filename :
1558761
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=446565
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