• DocumentCode
    446565
  • Title

    Surface studies and electrical tests of porous-silicon SnO2 gas-sensors

  • Author

    Dima, O. ; Becks, K.-H. ; Dima, A. ; Moldovan, C.

  • Author_Institution
    Dept. of Phys., Wuppertal Univ., Germany
  • Volume
    1
  • fYear
    2005
  • fDate
    3-5 Oct. 2005
  • Firstpage
    253
  • Abstract
    Electrical tests of porous/silicon SnO2 gas sensors show the advantage of the porous substrate on sensor sensitivity and working temperature. Surface studies, especially related to the metallisation process, reveal technological problems and possible directions of action that foster the integration of this highly promising platform with other technologies (particularly metallisation/interconnectivity technologies, such as Multi-Chip Module ∼ Deposited, MCM-D).
  • Keywords
    elemental semiconductors; gas sensors; metallisation; porous materials; silicon; tin compounds; MCM-D; Si; SnO2; electrical test; gas sensor; metallisation; porous substrate; sensor sensitivity; Boron; Etching; Ethanol; Gas detectors; Gold; Metallization; Pharmaceutical technology; Silicon; Temperature sensors; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
  • Print_ISBN
    0-7803-9214-0
  • Type

    conf

  • DOI
    10.1109/SMICND.2005.1558761
  • Filename
    1558761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=446565