Title :
In situ temperature monitoring system for experimental investigation of microstructures
Author :
Codreanu, Cecilia ; Stan, I. ; Craciunoiu, F. ; Obreja, V.V.N.
Author_Institution :
National Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
This paper presents a temperature monitoring system used for the experimental investigation and characterization of materials and microstructures or devices under different temperature conditions. After a general description of the measurement system, the temperature control and measurement block is presented. The heating and the sensing elements are firstly presented, and then the temperature monitoring unit is described. Besides the constructive solutions, problems related to thermal contact, calibration, error and sensitivity are also discussed.
Keywords :
calibration; temperature control; temperature measurement; calibration; constructive solutions; heating; in situ temperature monitoring system; microstructure; sensing elements; sensitivity; temperature control; thermal contact; Contacts; Heating; Magnetic force microscopy; Microstructure; Optical microscopy; Resistors; Temperature control; Temperature measurement; Temperature sensors; Testing;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558762
