• DocumentCode
    447595
  • Title

    Response of polymer-coated Love-wave device: a method to characterize thin film in the radio frequency domain

  • Author

    Razan, F. ; Zimmermann, C. ; Rebiere, D. ; Dejous, C. ; Pistre, J.

  • Author_Institution
    Centre de Recherche d´´Aubervilliers, France
  • Volume
    1
  • fYear
    2004
  • fDate
    4-7 May 2004
  • Firstpage
    37
  • Abstract
    In this paper, we present Love-wave devices and their characteristics. Love-wave sensors present a high sensitivity for gas detection. High selectivity is achieved with a sensitive coating chosen for its affinities toward a target compound, this coating is often a polymer. Acoustic wave devices are sensitive to all types of propagation perturbations which include mass loading and mechanical properties changes (e.g. viscoelasticity) of the coating. Experimental results allow to determine the contribution of viscoelastic properties of the sensitive coating to Love wave devices responses. Furthermore, it can be a mean to characterize thin film materials in radio frequency domain. Experiments were done with a polymer as sensitive layer: PEUT (polyetherurethane).The first study of PEUT properties at high frequency allows to estimate the dynamic shear modulus of this polymer and to confirm the glassy-like state of the material at high frequency. Further experiments using PDMS (polydimethylsiloxane) with different viscosity and stiffnesses on Love-wave devices are then presented and analyzed.
  • Keywords
    chemical sensors; polymer films; shear modulus; surface acoustic wave sensors; viscoelasticity; Love-wave sensors; acoustic wave devices; gas detection; polydimethylsiloxane; polyetherurethane; polymer-coated Love-wave device; radio frequency domain; sensitive coating; thin film; viscoelastic properties; Coatings; Elasticity; Frequency estimation; Gas detectors; Mechanical sensors; Polymer films; Radio frequency; Sensor phenomena and characterization; Thin film devices; Viscosity; Chemical sensors; Love wave; polymer shear modulus; sensitive coating; viscoelasticity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Electronics, 2004 IEEE International Symposium on
  • Print_ISBN
    0-7803-8304-4
  • Type

    conf

  • DOI
    10.1109/ISIE.2004.1571778
  • Filename
    1571778