Title :
Experimental demonstration of waveguide-coupled hexagonal micropillar resonators with round-corners in silicon nitride
Author :
Zheng, Shengmei ; Ma, Ning ; Poon, Andrew W.
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol.
Abstract :
We report laterally waveguide-coupled hexagonal micropillar resonators with designed round-corners in silicon nitride. Our experiments reveal highly efficient coupled nearly singlemode resonances in a large-sized micropillar with an optimized round-corner radius
Keywords :
micro-optics; microcavities; optical couplers; optical resonators; optical waveguides; silver compounds; SiN; round-corner radius micropillar resonators; silicon nitride; singlemode resonances; waveguide-coupled hexagonal micropillar resonators; Etching; Extraterrestrial measurements; Microcavities; Optical resonators; Optical scattering; Optical waveguides; Resonance; Silicon compounds; Throughput; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201807
