Title :
Second-harmonic characterization of Si/Hf(1-x)SixO2 interfaces
Author :
Carriles, R. ; Kwon, J. ; An, Y.Q. ; Miller, J.C. ; Downer, M.C. ; Price, J. ; Diebold, A.C.
Author_Institution :
Dept. of Phys., Texas Univ., Austin, TX, USA
Abstract :
We present a second-harmonic generation study of a set of device quality Si/Hf(1-x)SixO2 interfaces for different x values and annealing treatments. Rotationally-anisotropic, spectroscopic and time-dependent SHG depend strongly on dielectric composition and annealing.
Keywords :
hafnium compounds; optical harmonic generation; silicon compounds; Si-Hf(1-x)SixO2; annealing treatment; dielectric composition; rotationally-anisotropic SHG; second-harmonic generation; time-dependent SHG; Anisotropic magnetoresistance; Annealing; Azimuthal angle; Hafnium oxide; High K dielectric materials; High-K gate dielectrics; Nonlinear optical devices; Nonlinear optics; Optical films; Optical harmonic generation;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201879