• DocumentCode
    448035
  • Title

    Solid-immersion imaging of a silicon flip-chip with a resolution of 325 nm using the optical-beam induced current method

  • Author

    Ramsay, E. ; Pleynet, N. ; Xiao, D. ; Warburton, R.J. ; Reid, D.T.

  • Author_Institution
    Sch. of Eng. and Phys. Sci., Heriot-Watt Univ., Edinburgh, UK
  • Volume
    1
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    663
  • Abstract
    We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530 nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325 nm.
  • Keywords
    OBIC; erbium; fibre lasers; flip-chip devices; high-speed optical techniques; image resolution; monolithic integrated circuits; optical images; optical microscopy; silicon; two-photon processes; 1530 nm; femtosecond Er:fiber laser; optical-beam induced current method; silicon flip-chip; solid-immersion sub-surface imaging; two-photon photocurrent; Biomedical optical imaging; Erbium-doped fiber lasers; High-resolution imaging; Image resolution; Lasers and electrooptics; Lenses; Optical imaging; Optical microscopy; Silicon; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. (CLEO). Conference on
  • Print_ISBN
    1-55752-795-4
  • Type

    conf

  • DOI
    10.1109/CLEO.2005.201881
  • Filename
    1572947
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=448035