Title :
Solid-immersion imaging of a silicon flip-chip with a resolution of 325 nm using the optical-beam induced current method
Author :
Ramsay, E. ; Pleynet, N. ; Xiao, D. ; Warburton, R.J. ; Reid, D.T.
Author_Institution :
Sch. of Eng. and Phys. Sci., Heriot-Watt Univ., Edinburgh, UK
Abstract :
We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530 nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325 nm.
Keywords :
OBIC; erbium; fibre lasers; flip-chip devices; high-speed optical techniques; image resolution; monolithic integrated circuits; optical images; optical microscopy; silicon; two-photon processes; 1530 nm; femtosecond Er:fiber laser; optical-beam induced current method; silicon flip-chip; solid-immersion sub-surface imaging; two-photon photocurrent; Biomedical optical imaging; Erbium-doped fiber lasers; High-resolution imaging; Image resolution; Lasers and electrooptics; Lenses; Optical imaging; Optical microscopy; Silicon; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201881
