Title :
Micromechanical resonators with integrated optical waveguides for sensing applications
Author :
Pruessner, Marcel W. ; Chuang, Wen-Hsien ; Amarnath, Kuldeep ; Kanakaraju, S. ; Ghodssi, Reza
Author_Institution :
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD, USA
Abstract :
Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.
Keywords :
biochemistry; biosensors; indium compounds; integrated optics; micromechanical resonators; optical waveguides; InP; MEMS cantilever resonators; air detection; biochemical sensing applications; indium phosphide; integrated optical waveguides; low-power microelectromechanical systems; mass detection; micromechanical resonators; resonant frequency; Biomedical optical imaging; Frequency measurement; Indium phosphide; Integrated optics; Microelectromechanical systems; Micromechanical devices; Optical resonators; Optical sensors; Optical waveguides; Resonant frequency;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201914
