Title :
High power amplification of solid-state Nd:YAG laser with short pulses of 300 ps/5 kHz
Author :
Wang, T. ; Fujita, H. ; Mitra, A. ; Tsubakimoto, K. ; Fujimoto, Y. ; Yoshida, H. ; Nakatsuka, M.
Author_Institution :
Inst. of Laser Eng., Osaka Univ., Japan
Abstract :
A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81 W with excellent beam quality is available for injection pulse duration of 300 ps.
Keywords :
laser beams; neodymium; solid lasers; ultraviolet lithography; 300 ps; 5 kHz; EUV lithography; YAG:Nd; YAl5O12:Nd; beam quality; double pass diode-pumped rod laser preamplifier; high power amplification; injection pulse duration; solid-state laser; Diodes; Laser beams; Optical pulses; Power lasers; Pulse amplifiers; Pump lasers; Semiconductor laser arrays; Solid lasers; Solid state circuits; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.201918
