DocumentCode
448170
Title
Determining thickness independently from optical constants using ultrafast spectral interferometry
Author
Huang, Feng ; Federici, John F. ; Gary, Dale ; Jedju, Thomas ; Warren, Warren S.
Author_Institution
Dept. of Phys., New Jersey Inst. of Technol., Newark, NJ, USA
Volume
2
fYear
2005
fDate
22-27 May 2005
Firstpage
1103
Abstract
We show that the application of ultrafast techniques, specially femtosecond lasers, allow simultaneous measurements of material thickness and optical constants from transmission measurements using a frequency interferometer.
Keywords
high-speed optical techniques; light interferometry; measurement by laser beam; optical constants; thickness measurement; femtosecond lasers; frequency interferometer; material thickness measurement; optical constants; transmission measurements; ultrafast spectral interferometry; ultrafast technique; Beams; Optical interferometry; Optical materials; Optical pulses; Optical receivers; Optical refraction; Pulse measurements; Signal analysis; Thickness measurement; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN
1-55752-795-4
Type
conf
DOI
10.1109/CLEO.2005.202038
Filename
1573104
Link To Document