DocumentCode
448225
Title
Fabrication of optical waveguides in phosphorus-doped flame hydrolysis silica by direct electron-beam exposure
Author
García-Blanco, S. ; Aitchison, J.S. ; Taylor, R.S. ; Hnatovsky, C.
Author_Institution
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Volume
2
fYear
2005
fDate
22-27 May 2005
Firstpage
1279
Abstract
The refractive index profiles of optical waveguides fabricated by electron-beam irradiation of phosphorus doped flame-hydrolysis deposited silica were studied by microreflectivity. The results were compared with those obtained for germanium-doped silica.
Keywords
electron beam effects; germanium; integrated optics; laser materials processing; optical fabrication; optical waveguides; reflectivity; silicon compounds; GeO2-SiO2; direct electron-beam exposure; fabrication; optical waveguides; phosphorus-doped flame hydrolysis; silica; Biomedical optical imaging; Fires; Optical device fabrication; Optical films; Optical refraction; Optical variables control; Optical waveguides; Refractive index; Silicon compounds; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN
1-55752-795-4
Type
conf
DOI
10.1109/CLEO.2005.202098
Filename
1573164
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