Title :
Fabrication of two-layer microphotonic structures without planarization
Author :
Qi, Minghao ; Watts, Michael R. ; Barwicz, Tymon ; Rakich, Peter T. ; Socci, Luciano ; Ippen, Erich P. ; Smith, Henry I.
Author_Institution :
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A novel nanofabrication scheme for two-layer microphotonic structures were proposed and applied to the fabrication of integrated, mode-evolution-based polarization splitters and rotators. Prototype devices demonstrated effective splitting and rotating of polarization with low cross-talk.
Keywords :
integrated optics; light polarisation; micro-optics; nanotechnology; optical beam splitters; optical fabrication; cross-talk; mode-evolution-based polarization splitters; nanofabrication; planarization; prototype devices; rotators; two-layer microphotonic structures; Chromium; Etching; Optical device fabrication; Optical devices; Optical fiber polarization; Optical materials; Optical polarization; Planarization; Silicon compounds; Tellurium;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202101
