• DocumentCode
    450403
  • Title

    An Integrated Mask Artwork Analysis System

  • Author

    Mitsuhashi, Takashi ; Chiba, Toshiaki ; Takashima, Makoto ; Yoshida, Kenji

  • Author_Institution
    NEC-TOSHIBA Information Systems Inc., Kawasaki,JAPAN
  • fYear
    1980
  • fDate
    23-25 June 1980
  • Firstpage
    277
  • Lastpage
    284
  • Abstract
    A new LSI artwork analysis and processing system, called EMAP, is described with algorithms, a database schema and applications. EMAP provides the designer with the artwork verification and processing tools which include mask artwork processing, geometrical design rule checking, connectivity analysis and electrical circuit parameter calculation. The circuit connectivity data derived from the mask artwork data is used for input to a logic simulator, a timing simulator, a circuit simulator and a circuit schematic generator.
  • Keywords
    Circuit simulation; Databases; Error correction; Information analysis; Information systems; Laboratories; Large scale integration; Manufacturing; Permission; Process design;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation, 1980. 17th Conference on
  • Print_ISBN
    0-89791-020-6
  • Type

    conf

  • DOI
    10.1109/DAC.1980.1585256
  • Filename
    1585256