Title :
An Integrated Mask Artwork Analysis System
Author :
Mitsuhashi, Takashi ; Chiba, Toshiaki ; Takashima, Makoto ; Yoshida, Kenji
Author_Institution :
NEC-TOSHIBA Information Systems Inc., Kawasaki,JAPAN
Abstract :
A new LSI artwork analysis and processing system, called EMAP, is described with algorithms, a database schema and applications. EMAP provides the designer with the artwork verification and processing tools which include mask artwork processing, geometrical design rule checking, connectivity analysis and electrical circuit parameter calculation. The circuit connectivity data derived from the mask artwork data is used for input to a logic simulator, a timing simulator, a circuit simulator and a circuit schematic generator.
Keywords :
Circuit simulation; Databases; Error correction; Information analysis; Information systems; Laboratories; Large scale integration; Manufacturing; Permission; Process design;
Conference_Titel :
Design Automation, 1980. 17th Conference on
Print_ISBN :
0-89791-020-6
DOI :
10.1109/DAC.1980.1585256