DocumentCode
450403
Title
An Integrated Mask Artwork Analysis System
Author
Mitsuhashi, Takashi ; Chiba, Toshiaki ; Takashima, Makoto ; Yoshida, Kenji
Author_Institution
NEC-TOSHIBA Information Systems Inc., Kawasaki,JAPAN
fYear
1980
fDate
23-25 June 1980
Firstpage
277
Lastpage
284
Abstract
A new LSI artwork analysis and processing system, called EMAP, is described with algorithms, a database schema and applications. EMAP provides the designer with the artwork verification and processing tools which include mask artwork processing, geometrical design rule checking, connectivity analysis and electrical circuit parameter calculation. The circuit connectivity data derived from the mask artwork data is used for input to a logic simulator, a timing simulator, a circuit simulator and a circuit schematic generator.
Keywords
Circuit simulation; Databases; Error correction; Information analysis; Information systems; Laboratories; Large scale integration; Manufacturing; Permission; Process design;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation, 1980. 17th Conference on
Print_ISBN
0-89791-020-6
Type
conf
DOI
10.1109/DAC.1980.1585256
Filename
1585256
Link To Document