Title :
Development of X-ray active matrix pixel sensors for detection of electrons in scanning transmission electron microscope
Author :
Chen, W. ; Beuttenmuller, R.H. ; Elliott, D.C. ; Fried, J. ; DeGeronimo, G. ; Li, Z. ; O´Connor, P. ; Pinelli, D.A. ; Radeka, V. ; Rehak, P. ; Smith, G.C. ; Wall, J.S. ; Yu, B.
Author_Institution :
Brookhaven Nat. Lab., Upton, NY, USA
Abstract :
A method developed to produce an X-ray active matrix pixel sensor (XAMPS) is reported. Several problems had been encountered during the production, but solutions to all of them were found. We will present the design of the detector, justifying the choice of high resistivity silicon as the material for XAMPS. Production processing will be described with emphasis on encountered problems and their solutions. The detectors were produced and one of them was tested within the BNL scanning transmission electron microscope (STEM) for recording data.
Keywords :
X-ray apparatus; electron detection; position sensitive particle detectors; scanning-transmission electron microscopes; silicon radiation detectors; X-ray active matrix pixel sensors; convergent beam electron diffraction pattern; electron detection; high resistivity silicon; scanning transmission electron microscope; Bonding; Conductivity; Crystallization; Production; Scanning electron microscopy; Silicon; Testing; Transmission electron microscopy; X-ray detection; X-ray detectors;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2005 IEEE
Print_ISBN :
0-7803-9221-3
DOI :
10.1109/NSSMIC.2005.1596589
