Title :
Low-Loss, Polarization-Independent Silicon-Oxynitride Waveguides for High-Density Integrated Planar Lightwave Circuits
Author :
Shimoda, Tsuyoshi ; Suzuki, Kouichi ; Takaesu, Sekizen ; Furukawa, Akio
Author_Institution :
Networking Res. Labs., NEC Corp., Ibaraki
Abstract :
High-Delta silicon-oxynitride waveguides with low loss of 0.04 dB/cm and low polarization-dependence have been developed. A compact 40-channel AWG with a low insertion-loss of 2.5 dB has been demonstrated with these waveguides and spot-size converters
Keywords :
arrayed waveguide gratings; integrated optics; light polarisation; optical losses; silicon compounds; 2.5 dB; SiON; arrayed waveguide grating; high-density planar lightwave circuits; insertion loss; integrated planar lightwave circuits; low-loss waveguides; polarization-dependence; polarization-independent waveguides; silicon-oxynitride waveguides; spot-size converters;
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location :
Copenhagen
Print_ISBN :
87-90974-63-8
