• DocumentCode
    452222
  • Title

    Photonic Crystal Waveguides in SOI fabricated with deep UV lithography

  • Author

    Bogaerts, Wim ; Wiaux, Vincent ; Taillaert, Dirk ; Beckx, Stephan ; Baets, Roel

  • Author_Institution
    Dept. of Inf. Technol., Ghent Univ., Gent
  • Volume
    2
  • fYear
    2002
  • fDate
    8-12 Sept. 2002
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate photonic crystals for 1550 nm wavelengths fabricated with 248 nm-excimer laser deep UV lithography in silicon-on-insulator, combining high resolution with mass-manufacturing. The structures are of high quality. Measurements show transmission through waveguides and sharp bends
  • Keywords
    integrated optics; optical fabrication; optical waveguides; photonic crystals; silicon-on-insulator; ultraviolet lithography; 1550 nm; 248 nm; SOI fabrication; Si-SiO2; deep UV lithography; excimer laser lithography; mass-manufacturing; photonic crystal waveguides; photonic crystals; sharp bends; silicon-on-insulator; waveguide transmission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication, 2002. ECOC 2002. 28th European Conference on
  • Conference_Location
    Copenhagen
  • Print_ISBN
    87-90974-63-8
  • Type

    conf

  • Filename
    1601012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=452222