Title :
Mirrors With Integrated Position Sense Electronics for Optical Switching Applications
Author :
Roessig, Trey ; Arakelian, Ara ; Brosnihan, Tim ; Clark, Bill ; Han, David ; Judy, Michael ; Juneau, Thor ; Lemkin, Mark ; Sherman, Steve ; Swift, Jeff
Author_Institution :
Analog Devices, 2150 Shattuck Ave, Suite 450, Berkeley, CA 94704 USA, trey.roessig@analog.com
Abstract :
This paper describes novel MEMS mirror structures fabricated with on-chip capacitve position sensing capability. This technology could drastically lower the cost of all-optical switches. Methodology and initial results of the position sense functionality are described.
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location :
Copenhagen
Print_ISBN :
87-90974-63-8
