DocumentCode
452690
Title
MEMS ultrasonic sensor array with thick film PZT transducers
Author
Doerner, S. ; Hirsch, S. ; Lucklum, R. ; Schmidt, B. ; Hauptmann, P.R. ; Ferrari, V. ; Ferrari, M.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
487
Lastpage
490
Keywords
Biomembranes; Electrodes; Fabrication; Micromechanical devices; Sensor arrays; Silicon; Thick film sensors; Thick films; Ultrasonic transducer arrays; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602897
Filename
1602897
Link To Document