Title :
Investigation of nonlinear CMUT behavior
Author :
Lohfink, A. ; Eccardt, P.-C.
Keywords :
Acoustic transducers; Biomedical transducers; Biomembranes; Differential equations; Electrostatics; Harmonic distortion; Pistons; Ultrasonic imaging; Ultrasonic transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602920