• DocumentCode
    452707
  • Title

    Capacitive micromachined ultrasonic transducers (cmuts) with piston-shaped membranes

  • Author

    Huang, Yongli ; Haggstrom, E.O. ; Zhuang, Xuefeng ; Ergun, Arif S. ; Khuri-Yakub, Butrus.T.

  • Volume
    1
  • fYear
    2005
  • fDate
    18-21 Sept. 2005
  • Firstpage
    589
  • Lastpage
    592
  • Keywords
    Bandwidth; Biomedical transducers; Biomembranes; Capacitance; Fabrication; Resonance; Resonant frequency; Shape; Springs; Ultrasonic transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1602921
  • Filename
    1602921
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=452707