Title :
Capacitive micromachined ultrasonic transducers (cmuts) with piston-shaped membranes
Author :
Huang, Yongli ; Haggstrom, E.O. ; Zhuang, Xuefeng ; Ergun, Arif S. ; Khuri-Yakub, Butrus.T.
Keywords :
Bandwidth; Biomedical transducers; Biomembranes; Capacitance; Fabrication; Resonance; Resonant frequency; Shape; Springs; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
Print_ISBN :
0-7803-9382-1
DOI :
10.1109/ULTSYM.2005.1602921
