Cylindrical post coupled bandpass filter suitable for LIGA fabrication

In this paper, the feasibility of realizing high performance filters at microwave frequencies using the LIGA technique is investigated. A direct post-coupled 3-order Chebyshev bandpass filter is designed to verify this concept. An ideal filter model as well as a model that incorporates the practical design aspects measured from a LIGA PMMA cavity structure are simulated by the finite element method. The comparison of the results from the two models suggests that LIGA fabrication introduces only minor deteriorations and high performance microwave filters are possible.