Studies on the pull-up RF MEMS switch for the lower actuation voltage and high speed using double electrode

Author

Lee, Seong-Dae ; Jun, Byoung-Chol ; Baek, Tae-Jong ; Kim, Soon-Koo ; Kim, Sam-Dong ; Rhee, Jin-Koo ; Mizuno, Koji

Author_Institution

Millimeter-wave Innovation Technol. Res. Center, Dongguk Univ., Seoul, South Korea

Volume

1

fYear

2005

fDate

4-7 Dec. 2005

Abstract

We report a pull-up type RF MEMS switch using double electrode without elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.7 dB and an isolation of 50.7 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 80 ns, respectively.

Keywords

cantilevers; electrodes; microswitches; microwave switches; 0.7 dB; 120 ns; 4.5 V; 50 GHz; 50.7 dB; 80 ns; actuation voltage; cantilever; double electrode; elastic deformation; electrostatic force; movable lower contact pad; pull-up RF MEMS switch; transient times; Contacts; Electrodes; Electrostatics; Glass; Micromechanical devices; Millimeter wave communication; Millimeter wave technology; Radiofrequency microelectromechanical systems; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1606199

Filename

1606199