Title :
Non-destructive methods and devices for the inspection of key parameters of semiconductor materials
Abstract :
Diagnostics of semiconductor materials electrophysical parameters is a necessary part of the "know-how" both for semiconductor materials, and for various devices on their basis. The contactless, non-destroying quality monitoring is most suitable for these purposes for devices and installations.
Keywords :
nondestructive testing; semiconductor materials; contactless nondestroying quality monitoring; electrophysical parameters; nondestructive methods; semiconductor materials; Apertures; Conductivity; Contact resistance; Electrical resistance measurement; Inspection; Magnetic field measurement; Microwave measurements; Probes; Pulse amplifiers; Semiconductor materials; diagnostics; electrophysical parameters; measuring approaches; measuring bench; semiconductor materials;
Conference_Titel :
Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings
Print_ISBN :
0-7803-9433-X
DOI :
10.1109/APMC.2005.1606329
