Design and fabrication of substrate-independent integrated antennas utilizing surface micromachining technology

Author

Pan, Bo ; Yoon, Y. ; Papapolymerou, J. ; Tentzeris, M.M. ; Allen, M.G.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

2

fYear

2005

fDate

4-7 Dec. 2005

Abstract

This paper presents several novel 3D antennas topologies that feature the capability of substrate-independent integration for future mm-wave systems. The high-aspect-ratio surface micromachining technology has been utilized to implement these 3D structures. A 100 GHz vertical Yagi-Uda antenna is fabricated and tested for end-fire radiation applications. In addition, an air-filled elevated microstrip antenna resonating at 25 GHz is built and characterized for broadside radiation. A completely substrate-independent multi-depth-well integration scheme for large-scale antenna arrays is also proposed. Simulation and measurement data are provided to demonstrate the effectiveness and feasibility of the proposed scheme.

Keywords

Yagi antenna arrays; micromachining; microstrip antenna arrays; millimetre wave antenna arrays; 100 GHz; 25 GHz; 3D antenna topologies; air-filled elevated microstrip antenna; broadside radiation; end-fire radiation; large-scale antenna arrays; millimeter wave antenna; monolithic integration; substrate-independent integrated antennas; surface micromachining technology; vertical Yagi-Uda antenna; Antenna arrays; Antenna measurements; Fabrication; Micromachining; Microstrip antennas; Millimeter wave communication; Millimeter wave technology; Optical surface waves; Surface waves; Testing; 3D integration; millimeter wave antenna; monolithic integration; substrate-independent performance; surface micromachining;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1606531

Filename

1606531