MEMS-based tunable bandstop filter using electromagnetic bandgap (EBG) structures

Author

Karim, M.F. ; Liu, A.Q. ; Yu, A.B. ; Alphones, A.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore

Volume

3

fYear

2005

fDate

4-7 Dec. 2005

Abstract

A MEMS based tunable bandstop filter using electromagnetic bandgap (EBG) structure is proposed in this paper. A tunable band-stop filter (BSF) has been designed with flat response at a selected frequency by incorporating microelectromechanical systems (MEMS) bridges. An equivalent circuit model for the tunable bandstop filter is derived and its parameters are extracted by using commercial software. High resistivity silicon substrate and MEMS surface micromachining process are employed. The measurement results for the tunable band stop filter reveals a tuning range from 19 GHz to 17.3 GHz. Additionally, low-pass-band insertion loss is found to be 1.3- 2.4 dB.

Keywords

band-stop filters; circuit tuning; equivalent circuits; micromachining; microwave filters; photonic band gap; silicon; 1.3 to 2.4 dB; 19 to 17.3 GHz; electromagnetic bandgap structures; equivalent circuit model; high resistivity silicon substrate; microelectromechanical systems bridges; surface micromachining process; tunable bandstop filter; Bridge circuits; Conductivity; Equivalent circuits; Filters; Frequency; Metamaterials; Microelectromechanical systems; Micromechanical devices; Periodic structures; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1606719

Filename

1606719