Two differential open resonator techniques for measuring dielectric constants of thin films on substrates

Author

Dudorov, Sergey N. ; Lioubtchenko, Dmitri V. ; Mallat, Juha A. ; Räisänen, Antti V.

Author_Institution

Radio Laboratory/SMARAD, Helsinki Univ. of Technol., Finland

Volume

1

fYear

2005

fDate

4-6 Oct. 2005

Abstract

In this work we describe two methods developed for measuring dielectric constants of thin films deposited on a substrate. The samples are placed into the classical open Fabry-Perot resonator, and differential approach is used based on measurement of resonant frequency shifts caused by the presence of the film. One method utilizes a spherical resonator, while the other method utilizes a hemispherical resonator. Experimental realization of the methods has been carried out at frequencies of 100-143 GHz.

Keywords

dielectric thin films; laser cavity resonators; millimetre wave measurement; permittivity measurement; substrates; 100 to 143 GHz; Fabry-Perot resonator; dielectric constants; differential open resonator; hemispherical resonator; resonant frequency shifts; spherical resonator; thin films; Dielectric constant; Dielectric measurements; Dielectric substrates; Dielectric thin films; Frequency measurement; Laboratories; Mirrors; Permittivity measurement; Resonant frequency; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2005 European

Print_ISBN

2-9600551-2-8

Type

conf

DOI

10.1109/EUMC.2005.1608869

Filename

1608869