DocumentCode
453473
Title
Microwave measurements of thickness and conductivity of nanometer metal-semiconductor structures
Author
Abramov, A.V. ; Usanov, D.A. ; Skripal, A.V. ; Bogolyubov, A.S.
Author_Institution
Saratov State Univ., Russia
Volume
1
fYear
2005
fDate
4-6 Oct. 2005
Abstract
Method for nondestructive multiparameter check of electrophysical parameters of nanometer metal-semiconductor structures using frequency dependence of reflectance and transmittance had been proposed and implemented experimentally.
Keywords
electrical conductivity measurement; microwave measurement; semiconductor-metal boundaries; thickness measurement; conductivity measurement; electrophysical parameters; microwave measurements; nanometer metal-semiconductor structures; nondestructive multiparameter check; thickness measurement; Conductivity measurement; Electromagnetic scattering; Electromagnetic waveguides; Microwave measurements; Microwave theory and techniques; Nanostructures; Reflectivity; Semiconductor waveguides; Substrates; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2005 European
Print_ISBN
2-9600551-2-8
Type
conf
DOI
10.1109/EUMC.2005.1608905
Filename
1608905
Link To Document