Design and testing of frequency selective surfaces on thick silicon substrate operating at 600 GHz

This paper describes the design and experimental verification of frequency selective surfaces, to be used as quasi-optical filters in the sub-millimeter wave range. They consist of a thin metal layer perforated periodically with rectangular or dogbone-shaped holes, and supported by a thick silicon substrate. A set of filters with pass-band at 600 GHz and stop-band at 750 GHz have been designed and tested. The design procedure based on the MoM/BI-RME method, the manufacturing of prototypes by standard processes available from the semiconductor industries, and their measurement by CW and THz time-domain spectroscopy are reported in this work. This class of filters is mechanically robust, presents low losses (1.4 dB), exhibits good reproducibility, and permits a fine tuning of the stop-band frequency by slightly changing the incidence angle.