DocumentCode
455546
Title
The IET Seminar on MEMS Sensors & Actuators
fYear
2006
fDate
28-28 April 2006
Abstract
The following topics are dealt with: MEMS sensors; actuiators; fluidics and flow; physical sensors; RF and wireless; actuators; and biochemical sensors.
Keywords
actuators; chemical sensors; micromechanical devices; MEMS sensors; actuators; biochemical sensors; flow; fluidics; microelectromechanical sensors; radiofrequency;
fLanguage
English
Publisher
iet
Conference_Titel
MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on
Conference_Location
London
ISSN
0537-9989
Print_ISBN
0-86341-627-6
Type
conf
Filename
1662164
Link To Document