• DocumentCode
    455558
  • Title

    Keynote Address: The Dynamics of Degenerate Mode MEMS Sensors

  • Author

    Burdess, Professor Jim

  • Author_Institution
    Univ. of Newcastle upon Tyne, Newcastle upon Tyne
  • fYear
    2006
  • fDate
    28-28 April 2006
  • Firstpage
    55
  • Lastpage
    68
  • Abstract
    A collection of slides from author´s conference presentation is given.
  • Keywords
    gyroscopes; microsensors; MEMS sensors; damping control; degenerate mode; electrostatic tuning; fabrication process; gyroscopes;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on
  • Conference_Location
    London
  • ISSN
    0537-9989
  • Print_ISBN
    0-86341-627-6
  • Type

    conf

  • Filename
    1662176
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=455558