• DocumentCode
    456310
  • Title

    Proposal of a New Variant Resolution Function Adapted to the Low Energies in SIMS

  • Author

    Meriem, Berrabah ; Farah, Hamdi ; Faycal, B. ; Dupuy, J.-C.

  • Volume
    1
  • fYear
    2006
  • fDate
    24-28 April 2006
  • Firstpage
    151
  • Lastpage
    156
  • Abstract
    In the analysis by secondary ions mass spectroscopy (SIMS), for low energy, it is necessary to take into account the appearance of the roughness induced being analysed. This phenomenon results in the variation of the depth resolution function (DRF). The new variant resolution function suggested with the fact that is very adapted to profiles SIMS, and the extreme with the multilayer doping of Boron in Silicon.
  • Keywords
    Convolution; Deconvolution; Distortion measurement; Doping profiles; Energy resolution; Instruments; Mass spectroscopy; Nonhomogeneous media; Proposals; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information and Communication Technologies, 2006. ICTTA '06. 2nd
  • Print_ISBN
    0-7803-9521-2
  • Type

    conf

  • DOI
    10.1109/ICTTA.2006.1684361
  • Filename
    1684361
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=456310