• DocumentCode
    458568
  • Title

    High Index-Contrast Silicon-On-Insulator Nanophotonics

  • Author

    Bienstman, P. ; Van Laere, F. ; Taillaert, D. ; Dumon, P. ; Bogaerts, W. ; De Vos, Kristof ; Van Thourhout, Dries ; Baets, R.

  • Author_Institution
    Dept. of Inf. Technol., Ghent Univ.
  • Volume
    2
  • fYear
    2006
  • fDate
    18-22 June 2006
  • Firstpage
    124
  • Lastpage
    127
  • Abstract
    We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors
  • Keywords
    arrayed waveguide gratings; biological techniques; integrated optics; micro-optics; nanolithography; optical couplers; optical resonators; optical sensors; silicon-on-insulator; ultraviolet lithography; Si-SiO2; arrayed waveguide gratings; deep-ultraviolet lithography; grating couplers; high index-contrast nanophotonics; ring-resonator based biosensors; silicon-on-insulator nanophotonics; Arrayed waveguide gratings; Biosensors; Etching; Mirrors; Nanophotonics; Optical coupling; Optical fiber couplers; Optical ring resonators; Optical waveguides; Silicon on insulator technology; arrayed waveguide gratings; biosensors; nanophotonics; ring resonators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Transparent Optical Networks, 2006 International Conference on
  • Conference_Location
    Nottingham
  • Print_ISBN
    1-4244-0235-2
  • Electronic_ISBN
    1-4244-0236-0
  • Type

    conf

  • DOI
    10.1109/ICTON.2006.248354
  • Filename
    4013750
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=458568