Technology Route Towards Industrial Application of Rear Passivated Silicon Solar Cells

Author

Rentsch, J. ; Schultz, O. ; Grohe, A. ; Biro, D. ; Preu, R. ; Willeke, G.P.

Author_Institution

Fraunhofer Inst. for Solar Energy Syst., Freiburg

Volume

1

fYear

2006

fDate

38838

Firstpage

1008

Lastpage

1011

Abstract

Going beyond the standard industrial screen-printed Al-BSF rear side, this paper reports about process technologies for an industrial implementation of a rear passivated, locally contacted multicrystalline (mc) silicon solar cell. The solar cells rear side features a passivation stack system and an evaporated and LFC contacted Al layer. Due to the need of processing thinner wafers, a technology survey focuses on the adaptation of mainly inline based technologies for the realization of an industrial process scheme. New inline process technologies are introduced and compared with standard technologies. Up to date, large area mc-Si solar cells (156times156 mm²) fabricated completely with these inline technologies reach fill factors up to 76%, on reference cells (125times125 mm²) an efficiency of 16% is reached with an untextured front surface

Keywords

elemental semiconductors; evaporation; passivation; semiconductor device manufacture; silicon; solar cells; Si; evaporation; industrial process; industrial screen-printed Al-BSF rear side; inline process technology; laser-fired contact process; multicrystalline silicon solar cells; process technology; rear passivation; solar cells fabrication; thinner wafers process; Energy conversion; Furnaces; Manufacturing; Passivation; Photovoltaic cells; Photovoltaic systems; Plasma chemistry; Silicon; Solar power generation; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on

Conference_Location

Waikoloa, HI

Print_ISBN

1-4244-0017-1

Electronic_ISBN

1-4244-0017-1

Type

conf

DOI

10.1109/WCPEC.2006.279289

Filename

4059801