• DocumentCode
    460219
  • Title

    Infrared Heating with Opaque Quartz Reflector Technology

  • Author

    Kant, C.H. ; van Erven, A.J.M. ; Bosch, R.C.M. ; Stals, W.T.M. ; Bijker, M.D.

  • Author_Institution
    OTB Solar, Eindhoven
  • Volume
    1
  • fYear
    2006
  • fDate
    38838
  • Firstpage
    1249
  • Lastpage
    1252
  • Abstract
    To ensure the performance of the OTB solar deposition tools, we utilize a novel opaque quartz reflector technology for our short-wave infrared lamps. The opaque quartz reflector has a superior industrial robustness over conventional reflector technologies. Angular intensity measurements show that the reflectance of the opaque quartz material can compete with that of a gold reflector. In the near future, further developed opaque quartz reflectors with a reflectance close to that of gold are foreseen
  • Keywords
    antireflection coatings; infrared sources; quartz; reflectivity; semiconductor device manufacture; OTB solar deposition tool performance; SiO2; angular intensity measurements; infrared heating; opaque quartz reflector technology; reflectance; short-wave infrared lamps; Coatings; Electron tubes; Gold; Infrared heating; Lamps; Plasma temperature; Reflectivity; Robustness; Silicon; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on
  • Conference_Location
    Waikoloa, HI
  • Print_ISBN
    1-4244-0017-1
  • Electronic_ISBN
    1-4244-0017-1
  • Type

    conf

  • DOI
    10.1109/WCPEC.2006.279426
  • Filename
    4059864