Title :
Infrared Heating with Opaque Quartz Reflector Technology
Author :
Kant, C.H. ; van Erven, A.J.M. ; Bosch, R.C.M. ; Stals, W.T.M. ; Bijker, M.D.
Author_Institution :
OTB Solar, Eindhoven
Abstract :
To ensure the performance of the OTB solar deposition tools, we utilize a novel opaque quartz reflector technology for our short-wave infrared lamps. The opaque quartz reflector has a superior industrial robustness over conventional reflector technologies. Angular intensity measurements show that the reflectance of the opaque quartz material can compete with that of a gold reflector. In the near future, further developed opaque quartz reflectors with a reflectance close to that of gold are foreseen
Keywords :
antireflection coatings; infrared sources; quartz; reflectivity; semiconductor device manufacture; OTB solar deposition tool performance; SiO2; angular intensity measurements; infrared heating; opaque quartz reflector technology; reflectance; short-wave infrared lamps; Coatings; Electron tubes; Gold; Infrared heating; Lamps; Plasma temperature; Reflectivity; Robustness; Silicon; Tungsten;
Conference_Titel :
Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference on
Conference_Location :
Waikoloa, HI
Print_ISBN :
1-4244-0017-1
Electronic_ISBN :
1-4244-0017-1
DOI :
10.1109/WCPEC.2006.279426
