Title :
On Wafer Broadband Measurement for Substrate Material Characterisation
Author :
Ding, Jian ; Linton, David
Author_Institution :
The Inst. of Electron., Commun. & Inf. Technol., Queen´´s Univ. Belfast
Abstract :
Measurement of broadband substrate permittivity with temperature is reported making use of special calibration routines for post-processing of measured results. The LRRM method is used for frequency coverage in the range 50 MHz to 110 GHz using 100 mum GSG probes. Predictive software has been integrated with the existing measurement control package to achieve semi-automatic material characterisation
Keywords :
calibration; microwave measurement; permittivity; probes; 100 micron; 50 to 110 GHz; GSG probes; LRRM method; broadband substrate permittivity measurement; measurement control package; predictive software; semiautomatic material characterisation; substrate material characterisation; Calibration; Circuit synthesis; Circuit testing; Frequency measurement; Optical ring resonators; Permittivity measurement; Probes; Resonance; Resonant frequency; Temperature distribution;
Conference_Titel :
Electronics Systemintegration Technology Conference, 2006. 1st
Conference_Location :
Dresden
Print_ISBN :
1-4244-0552-1
Electronic_ISBN :
1-4244-0553-x
DOI :
10.1109/ESTC.2006.280078
