DocumentCode
460301
Title
On Wafer Broadband Measurement for Substrate Material Characterisation
Author
Ding, Jian ; Linton, David
Author_Institution
The Inst. of Electron., Commun. & Inf. Technol., Queen´´s Univ. Belfast
Volume
1
fYear
2006
fDate
5-7 Sept. 2006
Firstpage
674
Lastpage
678
Abstract
Measurement of broadband substrate permittivity with temperature is reported making use of special calibration routines for post-processing of measured results. The LRRM method is used for frequency coverage in the range 50 MHz to 110 GHz using 100 mum GSG probes. Predictive software has been integrated with the existing measurement control package to achieve semi-automatic material characterisation
Keywords
calibration; microwave measurement; permittivity; probes; 100 micron; 50 to 110 GHz; GSG probes; LRRM method; broadband substrate permittivity measurement; measurement control package; predictive software; semiautomatic material characterisation; substrate material characterisation; Calibration; Circuit synthesis; Circuit testing; Frequency measurement; Optical ring resonators; Permittivity measurement; Probes; Resonance; Resonant frequency; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Systemintegration Technology Conference, 2006. 1st
Conference_Location
Dresden
Print_ISBN
1-4244-0552-1
Electronic_ISBN
1-4244-0553-x
Type
conf
DOI
10.1109/ESTC.2006.280078
Filename
4060802
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